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Extreme ultraviolet lithography
Results: 188

#	Item
51	Sematech Advances EUV Technology by Reducing Defects in Mask Blanks Add to Reading List Source URL: phys.org Language: English - Date: 2015-03-04 02:48:20 Photomask Semiconductor fabrication plant Extreme ultraviolet Nanotechnology Ultraviolet University at Albany SUNY Technology New York Electromagnetism Extreme ultraviolet lithography College of Nanoscale Science and Engineering SEMATECH
52	2012 Edition of the Annual Solar-Terrestrial Centre of Excellence (STCE) Workshop On-orbit degradation of solar and space weather Instruments – Lesson learned – Thursday May 3rd 2012 Add to Reading List Source URL: stce.be Language: English - Date: 2012-04-24 08:18:44 Solar telescopes Space telescopes X-ray telescopes LYRA Space weather Hinode SWAP Extreme ultraviolet lithography Solar Monitoring Observatory Spaceflight Spacecraft Space
53	Extreme Ultraviolet Lithography: Towards the Next Generation of Integrated Circuits THE VIEWPOINT - Optical lattice solitons: Guiding and routing light at will Add to Reading List Source URL: opfocus.org Language: English - Date: 2010-03-11 13:42:27 Extreme ultraviolet lithography Multiple patterning Immersion lithography Photolithography Extreme ultraviolet Photoresist 11 nanometer X-ray lithography ASML Holding Microtechnology Materials science Technology
54	Production Technologies for Mass-production Pioneering Development of Immersion Lithography UCHIYAMA Takayuki Abstract NEC Electronics has pioneered the development of the immersion lithography technology in order to de Add to Reading List Source URL: www.nec.com Language: English - Date: 2012-09-11 09:28:37 Extreme ultraviolet lithography Multiple patterning Resist Semiconductor device fabrication Lithography 32 nanometer Solid immersion lens Photolithography Stepper Materials science Technology Immersion lithography
55	PHABLE-R exposure tool The PHABLE-R exposure tool has been developed for research labs and for product development. This unique system enables our customers to produce various periodic structures with the convenience the Add to Reading List Source URL: www.eulitha.com Language: English - Date: 2014-05-05 05:09:27 Microtechnology Photolithography Photoresist Photomask Resist Wafer Photonic crystal Multiple patterning Extreme ultraviolet lithography Materials science Semiconductor device fabrication Chemistry
56 $Electromagnetic radiation / Photonics / Diffraction grating / Extreme ultraviolet / Grating / Interference lithography / Electron beam lithography / Extreme ultraviolet lithography / Long-period fiber grating / Optics / Diffraction / Optical devices$	Nanostructuring News August 2010 25nm half-pitch EUV fabricated gratings now available Eulitha continues to add higher resolution structures to its line of standard Add to Reading List Source URL: www.eulitha.com Language: English - Date: 2014-05-05 05:11:39 Electromagnetic radiation Photonics Diffraction grating Extreme ultraviolet Grating Interference lithography Electron beam lithography Extreme ultraviolet lithography Long-period fiber grating Optics Diffraction Optical devices
57	Microsoft PowerPoint - ad-fieldingmfg[removed]Compatibility Mode] Add to Reading List Source URL: www.lec.ethz.ch Language: English - Date: 2014-08-15 04:24:00 Microtechnology Extreme ultraviolet lithography Extreme ultraviolet Photolithography Multiple patterning Photomask Semiconductor device fabrication Ultraviolet Abstract State Machine Language Materials science Technology Electromagnetic radiation
58	SLS Symposium on Nanostructures and Nanoparticles Tuesday, May 13, [removed]:00 to 11:45, WBGB[removed]:00 Surface sensitive measurements on the nanometer scale by means of grazing emission X-ray fluorescence Add to Reading List Source URL: www.psi.ch Language: English - Date: 2015-02-03 08:51:10 Spectroscopy Electromagnetic spectrum X-rays Scattering Extreme ultraviolet lithography Polymer physics Small-angle X-ray scattering X-ray fluorescence Interference lithography Electromagnetic radiation Physics Scientific method
59	Proposed list of topics for the workshop[removed]nm plasma sources to support high volume manufacturing (HVM) scanners Update on performance of high power EUV Sources Approaches to power scaling to enable 500 W - 1 kW E Add to Reading List Source URL: euvlitho.com Language: English - Date: 2013-08-14 22:44:49 Extreme ultraviolet lithography Extreme ultraviolet Ultraviolet
60	EUV Lithography Towards Industrialization Wim van der Zande, Director of Research, ASML Dublin Meeting November 2014 Public Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2014-11-29 19:17:34 Extreme ultraviolet lithography Extreme ultraviolet Ultraviolet

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